【摘要】 转印是柔性可延展电子器件制备的重要手段,而对印戳与元件界面作用力的调控是转印技术的关键.本文提出了一种内含四棱台空腔结构的电磁辅助转印印戳并建立了该印戳的力学模型.在交变电磁场作用下,印戳上部的磁性薄膜发生凹凸变形并通过空腔内封装的液体传递给底部的柔性薄膜,从而改变印戳底部空腔缺陷处的压力大小,实现对印戳和电子元件间作用力的调控.力学分析表明,该印戳在转印过程中底部开口空腔缺陷处压力变化的大小随着电磁驱动压力的增大而增大,而随着薄膜弹性模量、薄膜厚度、薄膜的边长比的增大而减小.印戳薄膜边长比、厚度、弹性模量越小,对转印越有利.更多还原

【Abstract】 Transfer printing is a key step in the preparation of flexible and stretchable electronic devices,whereas the key to the transfer printing is to control the interfacial force between the stamp and device.In this study,a stamp containing a four-prism cavity for electromagnetic-assisted transfer printing is proposed and a mechanical model of the stamp is established.The magnetic film in the upper part of the stamp is deformed under the action of alternating electromagnetic field.Then,the deformation of upper film is transferred to the flexible film in the bottom part through the liquid in the four-prism cavity so as to change the pressure in the opening cavity at the bottom of the stamp and control the interfacial force between the stamp and device.Mechanical analysis shows that the value of the pressure change at the cavity opening at the bottom during transfer printing increases with increasing electromagnetic driving pressure,but decreases with increasing elastic modulus and thickness of the upper and lower films,as well as with increasing side-length ratio between the upper and lower films.The smaller the film side-length ratio,thickness,and modulus,the more favorable the transfer printing.更多还原