【摘要】 基于MEMS可见光/红外转换芯片的动态红外场景生成器,具有波段宽、空间分辨率高、成本低等特点,可应用于半实物(HWIL)仿真系统中作为红外场景模拟器,也可以作为红外成像探测系统的测试设备。通过MEMS工艺在大面积自悬浮薄膜上制作周期性微结构阵列作为像元阵列实现高分辨率。本文研究了转换芯片的工作原理,并制作了像元阵列数大于1 024×1 024,像元尺寸35μm×35μm的转换芯片。利用该转换芯片构建了动态红外场景模拟器,实验结果表明动态红外场景模拟器系统满足空间分辨率大于1 024×1 024,工作波段范围3~5μm和8~12μm,温度范围283 K~500 K,帧频50 Hz,灰度等级256等性能。更多还原

【Abstract】 Dynamic IR scene generator based on the MEMS visible to infrared transducer has the characteristics of wide band,high spatial resolution and low cost.The visible to infrared transducer can be used as an IR scene simulator or a test equipment of an IR imaging detection system in the hardware-in-the-loop(HWIL)simulation system.High spatial resolution is realized by fabricating periodicity microstructure array as pixel array on a large-sized freestanding film based on MEMS technology.In this paper,the operating principle of the film transducer is described and the film transducer with more than 1024×1024 pixels and the pixel size of 35μm×35μm was fabricated.Based on the film transducer,a dynamic IR scene generation system was built and studied experimentally.The spatial resolution of the dynamic IR scene generator is more than1024×1024.The equivalent blackbody temperature can be varied from283 K to 500 K with spectral ranges 3μm~5μm and 8μm~12μm.The frame rate is 50 Hz and the gray scale is 256.更多还原