To improve the mixing effect of the fluids under micro scale condition and the mixing efficiency of micromixer,a novel PMMA micromixer embedded with 3D channel based piezoelectric actuation was developed.The micromixer uses PZT micropump with double chambers in series as the driving source,and is embedded with Y type mixing channel and 3D multi-corner spiral flow channel.The micromixer is manufactured by PMMA bonding process under certain temperature and pressure condition.The related structural parameters ...