【摘要】 碲锌镉(CdZnTe)是液相外延碲镉汞(HgCdTe)薄膜的最佳衬底材料。获得高质量的CdZnTe衬底表面对于提升红外探测器的性能有着十分重大的意义。针对CdZnTe表面加工技术进行了研究,开发出一种新的化学抛光技术,使得抛光后的CdZnTe表面粗糙度Ra可达0.3 nm。更多还原

【Abstract】 CdZnTe is the best substrate material for liquid phase epitaxial HgCdTe thin films. High quality CdZnTe substrate surface is very important to improve the performance of infrared detector. In this paper,the surface processing technology of CdZnTe was studied,and a new chemical polishing technology was developed,which making the surface roughness,Ra,of polished CdZnTe to 0. 3 nm.更多还原