【摘要】 针对宽频声表面波的高灵敏度检测需求,研究设计搭建了基于偏振差分干涉技术的激光声表面波检测系统。实验中从干涉条纹可见度和差分信号的大小来评估系统的调试效果,利用压电陶瓷纳米位移台和SIOS干涉仪对检测系统进行测试和标定,得到系统的最小静态、动态检测位移;对系统各组成部分的噪声信号进行分析,并提出相应的抑制方法。最后对系统进行重复性测量,并对铝、硅样片上的激光声表面波信号进行检测。本研究为声表面波检测系统的性能评估提供了科学可行的方法,为声表面波技术在无损检测中的应用提供了一种可靠的测量手段。更多还原

【Abstract】 Aiming at the high sensitivity detection requirement of broadband surface acoustic wave(SAW),a set of SAW detection system based on orthogonal polarization differential interferometry was designed. In experiment,the debugging effect of the system was evaluated according to the visibility of the interference fringes and the size of the differential signal. The system is tested and calibrated by a piezoelectric ceramic nano-displacement stage and a SIOS interferometer,the minimum static and dynamic displacement of the system was obtained. The noise signal of each component o the system was analyzed,and the corresponding suppression methods were put forward. At last,the system is measured repeatedly,and the laser SAW signals on the aluminum and silicon samples are detected on the system.This study provides a scientific and feasible method for the performance evaluation of SAW detection system and a reliable measurement method for the application of SAW technology in nondestructive testing.更多还原