The chemo-mechanical polishing(CMP) process was applied to the surface of long-wave HgCdTe(MCT) material grown by liquid phase epitaxy(LPE). The surface morphology of MCT films was characterized by a microscope, white-light interferometer(WLI), and 3D measuring laser microscope. The results showed that macro-defects in the MCT film surface could be removed by the CMP process. The surface roughness and flatness of MCT film were also reduced to 4 nm and 20 nm, which indicated an improvement in the quality of ...
【更新日期】
2018-11-22
【分类号】
TN305.2
【正文快照】
碲镉汞材料是具有直接带隙的化合物材料,其禁带宽度可随组分x的变化在0~1.6 e V范围内连续调节,可实现对整个红外波段的探测,是目前红外探测器研制的首选材料,在精确制导、空间遥感、导弹预警及航天领域等方面有着重要的应用[1]。碲镉汞材料的生长方法较多,其中液相外延法(Liqu
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