【摘要】 采用磁控溅射在Al₂O₃陶瓷表面沉积了Ti+Nb/Mo金属层,实现了氧化铝陶瓷的金属化,并通过电镀镍提高了金属化效果.采用AgCu28钎料,实现了金属化Al₂O₃陶瓷与Kovar合金的可靠连接.通过扫描电子显微镜和能谱观察了钎缝的微观组织.结果表明,钎料与母材发生了明显的界面反应.Cu元素扩散进入Kovar合金,同时Ni元素扩散进入钎料的富铜区,从而促进AgCu/Kovar连接界面的形成;金属化层在Al₂O₃/AgCu钎料界面处,起到了关键作用,其中铌可以抑制脆性化合物形成,缓解残余应力.金属化层镀镍后,钎缝中AgCu共晶区明显,且钎缝较宽,对提高镀镍试样的钎焊接头强度有一定作用.更多还原

【Abstract】 Ti+Nb/Mo thin films were deposited onto Al₂O₃ ceramic by magnetron sputtering with a subsequent nickel-plating to ensure the robust brazing of Al₂O₃ ceramic to Kovar alloy using the filler of Ag Cu28.Microstructures of the metallization layer and the brazing joints of Al₂O₃/Kovar were investigated systematically by scanning electron microscopy（SEM）and energy dispersive X-ray（EDS）.The results show that the interfacial reaction layers are created between filler alloys and base materials.Interdiffusion of Ni and Cu at the interface of Ag Cu/Kovar resulted in the formation of the reaction layer.The metallization layer plays an important role in hindering the formation of intermetallic compounds and relieving residual thermal stress at Al₂O₃/Ag Cu interface.In addition,the presence of eutectic region arising from nickelplating can improve the thickness of the brazing seam and therefore a good bonding between Al₂O₃ ceramic and Kovar was achieved.更多还原