【摘要】 通过采用常温、简单、成本低且与产线完全兼容的金属辅助化学刻蚀方法(MACE),在太阳电池正面制备硅纳米线、硅纳微米复合结构以及硅倒金字塔等结构,并且采用不同的钝化方式对太阳电池正面和背面实施钝化,以期提高器件的光学和电学性能.结果表明,在原子层沉积(ALD)的氧化铝对单晶硅纳微米结构上,同时实现了最低的光学减反(1.38%)和最低的表面复合速率(44.72cm/s),基于该结构的n型太阳电池最高转换效率达到21.04%.同时,制备出了光电转换效率为20.0%,PECVD-SiO2/SiNx叠层钝化的标准太阳电池尺寸的p型硅基纳微米复合结构太阳电池器件.进一步研究显示为一种新型硅倒金字塔结构阵列,具备更优异的光电性能.这些基于MACE的纳微米结构阵列太阳电池显示出在新一代高效太阳电池方面的极强竞争力.更多还原

【Abstract】 In this paper,various of novel textures such as silicon(Si)nanowires,nano-microstructures(NM-Strus)and inverted-pyramids have been prepared on the front surface of solar cell by simple,room-temperature,low-cost and production-compatible metal-assisted chemical etching(MACE).To improve the optical,electrical and device performance,these light-trapping structures are passivated by atomic layer deposition(ALD)Al2 O3 and plasma enhanced chemical vapor deposition PECVD-SiO2/SiNxthin films,respectively.The results show a simultaneous achievement of the lowest reflection(1.38%)and the lowest recombination velocity(44.72 cm/s),manifesting a highest energy conversation efficiency of 21.04%for the n-type Si NM-Strus based solar cell.Meanwhile,ap-type 20.0%-efficiency Si NM-Strus PERC solar cell with the standard size of solar wafer is fabricated.Furthermore,a novel Si inverted-pyramids arrays is prepared,showing better optical and electrical performances.These novel Si nanostructures-based solar cells by MACE will be good candidates of the new generation of high-efficiency solar cells.更多还原