【摘要】 文章针对一种无耦合的二维微位移工作台,推导了该工作台的刚度理论公式。首先给出了工作台的结构,推导了柔性铰链杆端点处的转角和位移;在此基础上推导了二维微位移工作台在x、y2个方向的刚度理论公式;最后采用有限元仿真计算值对刚度理论公式进行了验证。结果表明,刚度理论公式计算值与有限元仿真计算值的相对误差不超过该文给定参数范围的11.11%。更多还原

【Abstract】 The theoretical equation of stiffness about a decoupled two-dimensional micro-displacement worktable was deduced.Firstly,the structure of the worktable was introduced.Secondly,rotation angle and displacement of the connecting rod with flexible hinge were obtained.Then the theoretical equations of worktable’s stiffness in xand ydirection were deduced using the proposed rotation angle and displacement.Finally,the finite element calculated values were used to check the theoretical equations of stiffness.The results indicate that the relative errors between the theoretical stiffness and the finite element calculated values were less than 11.11%in a given range of parameters.更多还原