【摘要】 为了实现线性长度约18 mm,光纤端面位置偏差不大于2μm,纤芯垂直度偏差不大于0.17°的长线列密排光纤阵列的高精度制作,提出了一种长线列密排光纤阵列高精度设计制作方法。该方法综合了压板法和硅V型槽法两种方法的优点,采用表面刻制等深梯形槽的硅基片作为光纤定位模板,实现光纤端面的定位误差控制,同时结合光纤复定位工艺实现光纤轴向的定位误差控制。实际检测结果表明,阵列端面纤芯的横向偏差和竖向线性偏差均小于1μm,纤芯的轴向垂直度偏差不大于0.13°,实现了长线列密排光纤阵列高精度设计制作。更多还原

【Abstract】 In order to realize the high precision manufacture of long linear dense optical fiber array with a linear length of 18 mm, the fiber end-face deviation of the optical fiber end being not more than 2 μm and the verticality deviation of the core being not more than 0.17°, a high precision design and manufacture method for long linear dense optical fiber array is presented. The method combined the advantages of the platen method and the silicon V-groove method. The method uses a silicon substrate with a surface-etched equal-depth trapezoidal groove as an optical fiber positioning template to control the optical fiber end-face positioning error. By combining the optical fiber repositioning process together, the axial positioning error of the optical fiber can be controlled. The test results show that the lateral deviation and vertical linear deviation of the end-face of the array core are less than 1 μm, the axial verticality deviation of the core is not more than 0.13°. The high precision design and manufacture of long linear dense optical fiber array is achieved.更多还原