The influence of deposition process on the reliability of YbF3 films is studied from four aspects including deposition method,film thickness,substrate temperature and ion beam energy.The research results show that,in contrast to those by resistance heating evaporation,the films deposited by electron beam evaporation have a higher density and lower water-vapor absorption.When the film is too thick or the deposition temperature is too high,the stress of YbF3 film increases,which results in the occurrence of c...
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