【摘要】 研究了在1-on-1方式下激光预处理对HfO₂光学薄膜微观形貌、微观结构等性能的影响。实验采用薄膜阈值能量的10%、30%、50%和70%对HfO₂薄膜进行激光预处理,利用原子力显微镜（AFM）分别对预处理后薄膜表面10μm×10μm和3μm×3μm的区域进行测试,与预处理前相比,预处理后的薄膜所含杂质减少,薄膜表面锥状结构变得平滑;利用X射线衍射（XRD）和X射线光电子能谱（XPS）分别对预处理后薄膜的晶态结构和化学键以及价态进行测试,与预处理前相比,预处理后薄膜的晶态结构、化学键及价态均没有发生变化;利用XPS对预处理后薄膜所含的成分进行测试,与预处理前相比,预处理后薄膜中所含的Hf单质减少,HfO₂增多。实验结果表明,激光预处理具有抛光和氧化膜层的作用。更多还原

【Abstract】 In 1-on-1 case the influence of laser conditioning on the microscopic morphology and structure of HfO₂ optical thin film is studied.The HfO₂ thin films were irradiated with 10%,30%,50%and 70%of the threshold energy in 1-on-1.In order to research the microscopic morphology of HfO₂ optical thin film,the film surface areas of 10μm×10μm and 3μm×3μm were tested with atomic force microscope.Comparing laser conditioning with non-laser conditioning,the thin film being irradiated contains less impurities and its cone-shaped structure becomes smooth.The microscopic structure of thin film was tested with X-ray diffraction and X-ray photoelectron spectroscopy.Comparing laser conditioning with non-laser conditioning,the crystalline structure,the chemical bond and the element valence of thin film being irradiated are not changed.The components of thin film were tested with X-ray photoelectron spectroscopy.Comparing laser conditioning with non-laser conditioning,the thin film being irradiated contains less hafnium and more oxides of hafnium.The experimental results show that the laser conditioning plays an important role in polishing and oxidizing HfO₂ thin film.更多还原