【摘要】 本文采用FIB辐照样品表面和FIB提取样品截面两种方法,尝试获取Ag@SiO_x自组织结构的内部结构信息,分别得到柱状结构和核壳结构两种完全不同的结果。其中提取截面的方法可以在保留样品初始形貌的同时获取真实内部结构信息,结合EDS能谱,可以确定,半球状SiO_x颗粒包覆在实心银椭球体上表面,Ag@SiO_x自组织结构是一种粒子包覆型核壳结构。有序柱状结构并不反映样品真实内部结构,其产生与离子束的选择性刻蚀有关。更多还原

【Abstract】 In this paper, two methods are used to investigate the microstructure of self-assembly Ag@SiO_x by focused ion beam(FIB). Ordered columnar arrays are achieved by FIB surface irradiation. Core-shell structure is observed by FIB cross-section lift-out. It is revealed that the microsphere is a kind of particle coated core-shell structure. In detail, separated hemi-spherical SiO_x particles distributed in hexagon are coated on the top surface of ellipsoidal silver. Ordered columnar arrays are believed to form under different etching rates related with material species on the surface. SiO_x with slower etching rate acts as a mask so that the columns arrange regurlarly just as the hemi-spherical SiO_x particles and the columnar direction is in accordance with the incident direction of ion beam.更多还原