【摘要】 ITO薄膜即铟锡氧化物(Indium Tin Oxides)半导体透明导电膜,有良好的导电性,高的透过率,并且具有很高的可靠性,可应用于航天领域电磁监测卫星的太阳电池板上以控制其表面电位。针对航天器太阳电池阵用ITO薄膜的真空蒸镀法制备进行工艺优化,通过选用合适的蒸镀速率和退火条件得到具有较低电阻率、较高透过率并且与空间用三结砷化镓太阳电池相匹配的ITO盖片产品。更多还原

【Abstract】 ITO thin film, namely the transparent conductive film of indium tin oxides, has the characteristics of excellent electric conductivity, high transparency and high reliability. It can be applied to solar panels of spacecrafts to detect the electromagnetic field and control the surface potential. The process of ITO film vacuum evaporation method was optimized. By selecting suitable evaporation rate and annealing condition, the ITO cover glass sheet was obtained with lower resistivity and higher transmittance, matching the 3-junction GaAs solar cell.更多还原