【摘要】 针对IC (集成电路)芯片烘箱在温度控制中因腔体均匀性差导致调节效率低的问题,在烘箱温度控制程序中引入了对初始条件不敏感、能够寻求全局最优解的自适应在线遗传算法PID控制策略。通过对改进前后两种设备的算法模型进行实测数据对比分析,证明采用遗传PID控制方案的设备性能要远优于采用传统PID方案的设备,其温度调节速率明显提高,并具有良好的动态特性和鲁棒性。更多还原

【Abstract】 The poor uniformity is the key problem to keep IC oven high efficiency. An optimal genetic control algorithm is used in new advanced IC oven, which is not sensitive to oven’s initial condition, could find globally optimal solution, and has strong adaptability. The result of experiment data indicates that the new method could improve speed regulation of temperature, reduce settling time and overshoot, and the new control algorithm has better interference suppression and robustness than regular algorithm.更多还原