Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

【摘要】 Experimental results of a direct current enhanced inductively coupled plasma(DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency(RF) hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC?+?RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.更多还原

【Abstract】 Experimental results of a direct current enhanced inductively coupled plasma(DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency(RF) hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC?+?RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.更多还原