【摘要】 提出一种基于光子晶体微腔的高灵敏度的微力测量方法.首先,提出一种M型结构的梁作为传感探头,使系统在受到微力作用时,仅有光子晶体微腔的空气孔折射率发生变化而引起谐振波长的漂移,极大地提高了传感器的线性度和测量范围.然后,对微纳环结构的光子晶体微腔结构进行优化设计,获得了品质因子高达7 100的微腔.最后,选择合适的实验器件及其特性参数,搭建基于光纤环形衰荡的波长解调系统,实验结果表明该系统的波长解调灵敏度为90μs/nm,所设计的微力测量系统的灵敏度可达194.616μs/μN.更多还原

【Abstract】 A high-sensitive micro-force measurement method based on photonic crystal micro-cavity was proposed. Firstly,an M-typed beam was proposed as the sensing head,thus the resonance wavelength drift of the micro-cavity will only be affected by holes refractive index of photonic crystal micro-cavity when force was applied on this system,which could greatly improve the linearity and measurement range of sensor. Then,the structure of photonic crystal micro-cavity with micro-ring structure was optimized,and the quality factor of 7 100 was obtained. Finally,the wavelength demodulation system based on fiber loop ring-down was built,with proper selection and design of experimental apparatuses,and the wavelength demodulation sensitivity could reach to90 μs/nm. Therefore,it was demonstrated that the measurement sensitivity of 194. 616 μs/μN could be obtained by using our proposed micro-force measurement system.更多还原