【摘要】 NdFeB永磁材料具有优异的性能而广泛应用于各种电子器件及系统中。电子器件及系统的微型化要求NdFeB永磁材料薄膜化,而绿色经济和低碳经济的发展又扩大了对高矫顽力NdFeB永磁薄膜的需求。综合介绍了NdFeB永磁薄膜的制备方法,着重论述了磁控溅射法制备高矫顽力Nd FeB永磁薄膜的研究进展,最后展望了高矫顽力NdFeB薄膜研究未来的发展方向。更多还原

【Abstract】 NdFeB permanent magnetic materials have been widely applied in electronic devices and systems due to their excellent performance. With the miniaturization of electronic devices and systems, the demand for NdFeB permanent magnetic film becomes stronger. Meanwhile, the development of green and low-carbon economy requires higher coercivity of NdFeB permanent magnet film. In this paper, the preparation methods of NdFeB permanent magnet film are introduced, the research progress of magnetron sputtering high coercivity NdFeB film is emphatically discussed, and finally the future of high coercivity NdFeB film is prospected.更多还原