【摘要】 以ITO粉体为原料,制备出高固含量浆料,而后采用压力注浆成型获得ITO靶材坯体。研究了模具孔隙尺寸、原料粉以及助滤剂因素对坯体和靶材中间夹层表现程度的影响。结果表明,调整模具孔隙尺寸和加入助滤剂具有减轻甚至消除坯体中间夹层的作用;同时,使用烧结活性更高的原始粉制坯,可明显减轻烧结后靶材中间的夹层。更多还原

【Abstract】 ITO green body was prepared by pressure slip casting from solid high content slurry with ITO powder as the raw material. The effects of pore-size of mould,grain-size of powder and aid-filtration reagent green body were studied. The result showed that increasing the pore-size and adding aid-filtration reagent properly could decrease or even eliminate interlayer in the green body,meanwhile,interlayer-defects in the target material could be alleviated apparently with ITO powder of high sintering activity.更多还原