【摘要】 基于微机电(MEMS)兰姆波谐振器(LWR),设计了一种可在1μL液体中聚焦声波的压电声波执行器件,实现了皮升级液滴的生成和无喷嘴喷射。该压电声波执行器由8个谐振频率为247.6 MHz的LWR组成,通过物理场有限元仿真计算,设计了可在中心50μm区域内实现声波聚焦的器件结构。在实验中,通过制作的声波聚焦器件,观察到在1μL液体表面生成并喷射出皮升级小液滴现象。通过对输入功率的控制,可以实现单液滴喷射、多液滴连续喷射、以及局部沸腾多向喷射。液滴喷射系统利用声波聚焦产生的声流体效应实现无喷嘴的液滴喷射,在多个工程领域尤其是微流控方向有广阔的应用前景,如多向液滴喷射、细胞位置操控等。更多还原

【Abstract】 A piezoelectric acoustic wave actuator device,which can focus acoustic waves in a 1 μL droplet,is introduced based on MEMS Lamb wave resonator( LWR),achieving picoliter-scale droplet generation and ejection without nozzle. The device consisting of eight 247.6 MHz LWRs focuses acoustic waves in 50 μm central area,which is designed by physical fields finite element analysis. Experimentally,picoliter droplets can be generated on the surface of a 1 μL droplet. Single droplet ejection,continuous ejection,and multidirectional ejection with local boiling are all observed experimentally by controlling the input power. The nozzleless droplet ejection system has great potential in engineering( e.g. microfluidics),such as applications of multidirectional droplet ejection and cell manipulation.更多还原