A method of ICP-MS after acidification separation was developed for the determination of nine different impurities(including Al,Fe,Sn,Te,Sb,Ti,Ga,Pb,Ge)in high purity selenium.The interferences on analytes and the pollution of sample introduction system were efficiently avoided by separation impurity elements frommatrix selenium by means of low boiling point of selenic acid.The influences of dosage of sulfuric acid to separation effects were studied.The variation trend of ~(74)Ge and ~(76)Ge contents with t...