【摘要】 本文介绍了一种基于ARM微控制器的真空测量及控制系统。系统由ARM微控制器、ADC采集电路、CAN通讯接口、HM-TRP无线收发模块、上位机和真空规组成。将其应用于四极杆质谱仪,能同时测量接口、离子传输和四极杆三个部分的真空度,并据此实现了仪器单元的级联控制和仪器的流程控制;同时,将各个部分的真空度上传至上位机显示以及通过无线模块传送至显示终端进行显示和控制。将该系统应用于钢研纳克检测技术有限公司的PlasmaMS 300仪器,实验表明,该系统能准确且稳定地实时监测仪器的真空度,确保了仪器的正常工作及关键部件的安全;同时,部件间的级联控制和整机流程控制进一步提高了仪器的自动化程度和可靠性。更多还原

【Abstract】 This paper presents an vacuum measurement and control system which was based on ARM micro-controller. The system consists of ARM micro-controller, ADC acquisition circuit, CAN communication interface, HM-TRP wireless transceiver module, PC and vacuum gauges. When it was used in quadrupole mass spectrometer, it can measure vacuum of interface module, ion transport module and quadrupole module simultaneously. According to the vacuum values, cascade control between the instrument modules and process control of the instrument were achieved. Also, the vacuum values were sent to PC to display and were sent to display terminal by wireless module to display and control. The system was applied to Plasma MS 300 of NCS Testing Technology Co., Ltd. Experiments show that the system can accurately and stably monitor the vacuum of the instrument in real-time. It ensured the normal operation of the instrument and the safety of the critical components. At the same time, cascade control between the instrument modules and process control of the instrument improved the degree of automation and reliability of the instrument.更多还原