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The State-of-the-art of Film Bulk Acoustic Wave Resonators Filter

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ã€Authorã€‘ XU Xueliang;LU Yujiao;YANG Liu;DU Bo;JIANG Xin;MA Jinyi;24th Insititute of China Electronics Technology Group Corporation;CMCU Engineering Co.,LTD;26th Insititute of China Electronics Technology Group Corporation;State Key Lab.of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;

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ã€Abstractã€‘ Thin film bulk acoustic wave resonator(FBAR)filter has many advantages of small size,high performance,good consistency and manufacturability.The related products have been widely used in the mobile communications market.Based on the basic principle of FBAR technology and the structure of the device,the present situation and development trend of FBAR technology are discussed in this paper.It is indicated that the future of FBAR filter technology will be developed to the direction of broadband,high power,high temperature stability and miniaturization.æ›´å¤š è¿˜åŽŸ