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U形互连-弹性基底组合结构延展性分析

Stretchability of U-patterned interconnect on elastic substrate

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【作者】 黄涛董文涛肖琳唐伟黄永安

【Author】 Huang Tao;Dong Wentao;Xiao Lin;Tang Wei;Huang Yongan;State Key Lab.of Digital Manufacturing Equipment & Technology,Huazhong University of Science & Technology;

【机构】 华中科技大学数字制造装备与技术国家重点实验室柔性电子研究中心

【摘要】 可延展柔性电子器件可共形贴合在复杂曲面的弹性物体表面,在生物集成电子、共形天线等领域具有广泛应用。岛-桥结构设计提高了柔性电子器件的可拉伸能力,桥结构通常设计成U形互连结构,通过有限元计算发现,在拉伸过程中该结构呈现非常复杂的变形行为:桥结构经历纯弯、整体受拉,最后进入塑性变形阶段。桥结构的线宽和结构长跨比对结构延展性影响显著,计算结果表明:宽度减小可以提高结构拉伸能力,但是宽度过小,结构拉伸能力急剧降低;当结构宽度较大时,结构断裂前局部出现平面外屈曲;而跨度增加普遍明显地提高了结构的拉伸能力,但会使结构尺寸变大;长跨比小于1.4时,U形互连结构的延展性随长跨比的增加而增大。通过U形互连结构的变形机理研究可以优化互连结构的结构参数,提高柔性电子器件的延展性。

【Abstract】 Stretchable electronic devices are widely used in applications in biomedical devices and conformal antennas that require intimate integration with complicated surfaces of elastomers. The island-bridge layout improves the stretchability in practical flexible electronic devices,among which U-patterned interconnects have been designed to enable devices’ repeatable stretchability up to 40%. While the island-bridge-substrate structure is stretched,complex deformation is observed by use of FEM. These structures suffer unilateral tension and compression,global tension and plastic deformation. The width and length \ spacing ratio significantly influent the stretchability. The results demonstrate that reduction of width enhances the stretchability,while degrades it when width becomes too small. When width is large,out-plane buckling appears before cracks occur. Spacing always increases the stretchability while the dimensions would become large. When the length/spacing ratio is smaller than 1. 4,the stretchability increases as it grows. Therefore,study for the deformation mechanism of U-patterned interconnects could optimize its geometry parameters and improve the stretchability of flexible electronic devices.

【基金】 国家自然科学基金项目(51322507,51175209);中央高校基本科研业务费专项资金资助项目(2013YQ048,2013TS019)
  • 【文献出处】 现代制造工程 ,Modern Manufacturing Engineering , 编辑部邮箱 ,2017年04期
  • 【分类号】TN60
  • 【被引频次】1
  • 【下载频次】188
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