【摘要】 以乙酸锌水溶液为前驱液,采用旋涂法在石英声表面波器件上制备了氧化锌纳米薄膜,研究退火时间对气体声表面波传感器的频率响应及其机制的影响。利用X射线衍射仪对氧化锌纳米薄膜的晶体结构进行了分析,并利用扫描电镜对其表面形貌进行了表征。利用谐振电路测试了声表面波传感器对氨气的频率响应特性。实验中将声表面波器件分为A/B两组进行实验:A组退火1h,制备的气体传感器检测时出频率偏移△f_A>0;B组经过5 h退火处理,输出频率偏移△f_B分两个阶段,初始△f_B>0然后减小变为△f_B<0。对所得的实验结果进行了理论分析。更多还原

【Abstract】 Zinc oxide thin films were prepared on quartz surface acoustic wave(SAW) devices by spin coating method using zinc acetate aqueous solution as precursor. Effect of annealing time on frequency response and mechanism of gas SAW sensors was investigated. A X-ray diffractometer(XRD) was employed to characterize. the crystallinity of the ZnO nanofilms. A scanning electron microscopy( SEM) was used to characterize the morphology of the prepared ZnO nanofilms. Resonance circuit was used to detect the frequency response of SAW sensors to ammonia gas. In this experiment, SAW devices were divided into two groups of A and B. A group was annealed 1 h, and the frequency offset of A group in detecting was △f_A>0. B group was annealed 5 h, and the output frequency offset(△A_B) was divided into two stages, at the beginning the output was △f_B>0 and then the output became △f_B<0. Theoretical analysis was given to the experimental results obtained.更多还原