【摘要】 为了改进微光机电系统中加速度集成化差、灵敏度低问题,采用过振保护、稳定性较好固支梁进行加速度传感系统设计。通过环形谐振腔和直波导耦合的方式实现微环谐振腔设计,利用控制波导长度参数实现耦合稳定性、强度等调节。理论分析了实现光强谐振、光放大的过程,固定的固支梁系统,得到了微环谐振腔波长,模型分析得出通过波长变化得到检测微环输出端的光谱变化。传感特性分析表明:微环谐振腔的输出光强谐振峰值高,自由频范围明显小,有利于测量高精度变化量;加速度变化量与输出光谱表现为线性关系,设计的加速度传感系统灵敏度可以达到50 pm/g。更多还原

【Abstract】 In order to solve the problems that the acceleration integration of light mechanical and electrical system is poor,and the sensitivity is low,this paper adopts acceleration sensor system design by using vibration protection and good stability of clamped beams. The circular cavity and straight waveguide are coupled to realize the design of micro ring resonator,parameters of length of the waveguide are applied to control stability,strength,etc. The intensity of resonance,optical amplification process,and fixed clamped beam system are analyzed theoretically,the wavelength is obtained; by the model analysis wavelength change of the micro ring resonator is detected. Sensing characteristics analysis shows that the micro ring resonator output light intensity of the resonant peak is high,the free frequency range is obviously small,and the method can measure the precision variation. Acceleration variation has a linear relationship with the output spectrum,the sensitivity of the acceleration sensor system designed can reach 50 pm/g.更多还原