First of all, the research progress of removing B and P impurities in halosilane system is introduced, and the main methods, results and findings of the relevant researches at home and abroad are summarized. Secondly, the present status of the research on the process of removing B and P impurities from the halosilane system is analyzed, and the advantages and applicability of various methods at home and abroad are also summarized.. Finally, the research on the removal of B and P impurities in the halosilane...
| 
推荐 
点击下列相关研究机构和相关文献作者，可以直接查到这些机构和作者被《中国知识资源总库》收录的其它文献，使您全面了解该机构和该作者的研究动态和历史。
