【摘要】 碲化镉(CdTe)因具有良好的光电性能和吸收性能经常被作为太阳电池的吸收层材料。以纯度为99.99%的CdTe陶瓷靶为靶材在玻璃衬底上采用射频磁控溅射的方法制备了一系列的CdTe薄膜,研究了衬底温度对样品薄膜的厚度、结构和光学性能的影响。结果表明:随着衬底温度的增加薄膜的厚度在逐渐地减少;制备的薄膜都是立方闪锌矿结构且具有高度的(111)面择优取向;薄膜对可见光有较好的吸收性能,随衬底温度的增加而减小。更多还原

【Abstract】 Cadmium telluride( CdTe) is often used as an absorbent material for solar cells because of its excellent photoelectric properties and absorption properties. The CdTe thin films were deposited with a purity of 99. 99% CdTe ceramic target for target material by RF magnetron sputtering on glass substrate.The effects of substrate temperature on the thickness,structure and optical properties of the CdTe films were investigated. The results show that with the increase of the substrate temperature,the thickness of the film decreases. All CdTe thin films are cubic sphalerite structure with a preferred orientation in( 111)direction. The film has better absorption properties to visible light and decreases with the increase of substrate temperature.更多还原