【摘要】 设计并制作了一种适用于原位纳米力学测试的原子力显微镜(AFM)测头.测头由光学检测系统和Z向压电陶瓷微位移机构组成.其中光学检测系统采用光杠杆与显微镜同轴光路检测探针形变,压电位移机构内置电容传感器可实现探针进给量的闭环控制.标定实验表明该测头闭环位移分辨力优于10 nm,在标定范围内具有很好的线性.利用该测头对某型微悬臂梁法向弹性常数进行了测量,测得值与采用具有溯源性的标定方法所得结果一致.更多还原

【Abstract】 A new atomic force microscopy(AFM) head is developed for the in-situ nano-mechanics measurement.The AFM head is composed of an optical detection system and a piezo scanner in Z-axis.The optical detection system consists of a microscope and a coaxial optical lever,which can detect the deflection of the AFM cantilever probe.The piezo scanner is integrated with a ring-shaped capacitance sensor which can realize closed-loop control of the displacement in Z-axis.Calibration indicates that the closed-loop resolution of the Z-scanner is better than 10 nm,and the displacement is with good linearity in the whole range.The AFM head is utilized to measure the normal spring constant of a micro cantilever.The measurement result is in agreement with the value obtained by a traceable calibration method.更多还原