【摘要】 为了提高微阵列表面自由曲面的超精密加工应用中的跟踪精度和抗干扰性,对周期性谐波扰动信号的观测结果作出实时估计和补偿,设计了一种自适应前馈误差消除(AFC)控制器。首先,分析了傅立叶级数的正弦和余弦信号组成影响系统的周期性谐波扰动信号。其次,详细地推导了自适应前馈误差消除算法,得出传递函数。然后,以自适应前馈误差消除控制器作为前馈控制器,应用PID作为反馈控制器,设计了复合控制器,并解释了工作流程。最后,数字仿真实验显示,自适应前馈误差消除控制具有较好的控制效果。更多还原

【Abstract】 To improve tracking accuracy and robustness in ultra-precision machining for the microstructured freeform surface,a active feedforwardcancellation(AFC) controller was designed. It can make real-time observations to estimate and compensate for periodic and harmonic disturbances. Firstly,an analysis of the Fourier series harmonic sine and cosine of periodic disturbance signals affecting the system was given. Secondly,a detailed derivation of AFC was given. And its transfer function was obtained.Byusingthe AFC as the feedforward controller,combined with PID as the feedback,a composite controller was designed. And the working procedure was explained. Digital simulation results showed that AFC had good controlling quality.更多还原