【摘要】 为了提高大尺寸台阶结构的单边测量精度、缩短测量时间,基于变速扫描技术,并利用傅里叶变换提取法及单边台阶评价算法进行扫描干涉信号的处理,提出并搭建了具有变速扫描功能的白光干涉测量系统。并且利用该系统对标称值为9.976±0.028μm的台阶标准样板进行了测量,10次重复性测量结果为9.971μm,标准偏差量为0.007μm,测量时间仅为35 s,远小于常规扫描方法的222 s,大大缩短了测量时间,因此说明了该系统在大尺寸台阶结构测量中,具有较高的精确性与高效性。更多还原

【Abstract】 A white light interference system was developed with a speed-variable scanning technology to improve signal utilization precision and short measuring time for a large step structure measurement. A Fourier transform and unilateral step evaluation algorithm were performed for processing the scanning interference images. A calibrated standard step height of 9.976 ±0.028 μm was measured by the white light interference system using the speed-variable scanning method, the measuring time was 35 s, which was much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurement shows a result of 9.971 μm with a standard deviation of 0.007 μm, illustrates that the system has accuracy and high-efficiency in the measurement of large step structure.更多还原