【摘要】 本文设计了一种可实现矩形波导TE10模式转换为圆波导TE01模式的转换器,用于电子回旋共振(ECR)技术薄膜沉积,使微波功率以特定模式分布在反应腔中与磁场共同作用产生等离子体,并由磁控管输出的微波中心频率为915 MHz。在满足工作带宽要求的基础上尽量提高转换效率,抑制噪声模式。通过三维仿真软件HFSS对结构进行优化,在915 MHz中心频率处转换效率达到99.90%,在中心频率20MHz范围内转换效率达到99.00%,能够满足磁控管工作频率在915 MHz下的带宽要求。更多还原

【Abstract】 In this paper,we design a mode converter that can convert the TE10 rectangular waveguide mode into TE01 circular waveguide mode. It is used in the thin film deposition in electron cyclotron resonance( ECR)technology,so the microwave power will keep a particular pattern distribution in the reaction chamber and work together with the magnetic field to produce plasma. The magnetron center frequency of output power is 915 MHz. In order to avoid the motivation of the spurious modes,improve the conversion efficiency and keep the bandwidth unchanged,we use HFSS to optimize the structure. The resulted conversion efficiency is about 99.90% at 915 MHz. The conversion efficiency is bigger than 99. 00% within the scope of the center frequency of 20 MHz,it satisfies with the requirements.更多还原