【摘要】 基于光学干涉的测量方法,通常都有高精度、高灵敏度的特点,信号易受环境干扰而不稳定,使用时须远离振源。若要将光学干涉系统用于在线检测,必须提高其抗干扰性。本文在以前的工作基础上,从干涉光路的实现方式着手,制作了一套一体化的迈克尔逊干涉装置,可用于多层光学平片的厚度检测。该装置通过巧妙的设计和高精密加工,使整个光路结构为一整体,避免了测量过程中外界干扰的影响。通过与光纤式迈克尔逊干涉系统做实验对比,验证了该装置在测试过程中有良好的稳定性和抗干扰性。最后采用宽带光源干涉的方法对多层光学平片的厚度进行测量,验证了该装置用于精密在线测量的可行性。更多还原

【Abstract】 The measurement system based on optical interference has obvious advantages of high precision and high sensitivity. However, the signal is easy to be disturbed by vibration from environment, so the system needs to stay away from the vibration source. To use the optical interference method for real-time measurement, it has to improve the system’s stability. In this paper, we proposed an integrated Michelson interference device to measure the thicknesses of multiple layers of optical plate, which could improve the stability of the optical interference system in a new way. Through smart design and high precision processing technique, the light path of the structure was integrated into a whole, which could avoid disturbing successfully. Compared with fiber based interferometer, this device could bring obviously more stable signal. The thicknesses of the multiple layers of optical plate were measured to confirm its feasibility to do the real-time precision measurement.更多还原