【摘要】 对应用于太阳能光热领域的TiO₂进行掺氮,并与不锈钢（stainless steel,SS）复合,采用磁控溅射法制备SS-TiON（HMVF,high metal volume fraction）/SS-TiON（LMVF,low metal volume fraction）串联双吸收层,并制备4层结构的太阳能光谱选择性吸收光热薄膜Cu/SS-TiON（HMVF）/SS-TiON（LMVF）/Al₂O₃。利用紫外–可见分光光度计、红外光谱仪、吸收率发射率测试仪、X射线光电子能谱仪与原子力显微镜等表征该太阳能光热吸收薄膜的光学性能、成分、结构与形貌。结果表明,通过优化双吸收层的厚度与成分,沉积在Al基底上的Cu/SS-TiON（HMVF）/SS-TiON（LMVF）/Al₂O₃太阳能选择性吸收薄膜,具有较高的吸收率（0.902）和较低的发射率（0.052）。该膜系经400℃高温条件下大气退火2 h后,由于出现晶粒团聚现象,光学性能有所下降。更多还原

【Abstract】 TiO₂ was applied in the field of photothermal transformation of solar energy.N-doped TiO₂ and stainless steel（SS） were deposited alternatively in a magnetron sputtering system,which formed a tandem double absorption layer（SS-TiON（HMVF,high metal volume fraction）/SS-TiON（LMVF,low metal volume fraction））.A four-layer structure of solar spectral selective absorbing film（Cu/SS-TiON（HMVF）/SS-TiON（LMVF）/Al₂O₃） was developed.The optical property,composition and morphology of the solar photothermal absorption film were characterized by UV-VIS spectrophotometer,infrared spectrometer,absorptivity emissivity tester,X-ray photoelectron spectrometer and atomic force microscope,respectively.By optimizing the layer thickness and composition of the double absorption layer on Al substrate,a solar selective absorber film of Cu/SS-TiON（HMVF）/SS-TiON（LMVF）/Al₂O₃ with high absorption rate（0.902） and low emissivity（0.052） can be obtained.The optical performance of the film decreases due to the aggregation of grains after annealling in atmosphere at 400 ℃ for 2 h.更多还原