【摘要】 为了在牺牲层工艺中保护金属电极不被腐蚀,提出了一种利用铝层保护金属电极的方法。在试验中采用了两种铝保护层厚度300 nm和1μm,在两种腐蚀液体4NH4F∶1HF∶2甘油和1HAC∶1NH4F中进行了试验,通过试验表明,铝金属层在两种腐蚀液体中都能够有效保护金属电极,延长牺牲层的腐蚀时间。最后,通过SOI微加速度计加工工艺进一步验证了该方法的有效性。更多还原

【Abstract】 In order to protect the metal electrode in sacrificial etching process,a method of using is aluminum layer to protect metal electrode is proposed. Two thick aluminum layers( one is 300 nm,the others is 1 μm) to protect metal electrode were studied in two etchants,one is 4NH4 F ∶ 1HF ∶ 2 glycerol and the other is 1HAC ∶ 1NH4 F.Through the experiment,the metal pad can be kept in good condition after a long etching time through the protection of aluminum layer. Finally,this method is tested effective through SOI accelerometer fabrication.更多还原