【摘要】 采用对靶设计的磁控溅射法在SiC纤维表面先后沉积了（Al+Al2O3）扩散阻挡层和Ni-Cr-Al合金先驱层,制备得到SiCf/Ni-Cr-Al先驱丝。研究了涂层的形貌、成分和相组成,以及涂层对SiC纤维力学性能的影响。对先驱丝在850℃/150 h和900℃/150 h进行真空热处理。结果表明:Al₂O₃涂层均匀致密,呈非晶态,Ni-Cr-Al合金涂层成分分布均匀,与靶材成分相当;涂层与SiC纤维结合良好,且对SiC纤维力学性能影响较小;先驱丝在真空热处理后,Ni-Cr-Al合金层仍保持完整,（Al+Al₂O₃）涂层有效的抑制了界面处元素扩散和化学反应,保证了高性能的SiC_f/Ni-Cr-Al复合材料的制备。更多还原

【Abstract】 SiCf/Ni-Cr-Al precursor wires were obtained by deposition of（Al+Al₂O₃） diffusion barrier layers and Ni-Cr-Al alloy coating on the surface of SiC fiber via magnetron sputtering. The morphology, composition and phases of the coatings were studied, and the influence of the coatings on the mechanical properties of SiC fiber was investigated. The precursor wires were treated in vacuum at 850 °C and 900 °C for 150 h. The results show that（Al+Al₂O₃） coating is uniform and dense, the Al₂O₃ coating is amorphous, and the composition of Ni-Cr-Al alloy coating is close to that of Ni alloy target. The（Al+Al₂O₃） layer and Ni-Cr-Al layer combine well with SiC fiber and have extremely slight negative effect on the tensile strength. After heat treatment of the precursor wire in vacuum, the Ni-Cr-Al alloy coating remains intact, and Al₂O₃ coating effectively blocks the element diffusion and restricts the reaction between SiC fiber and Ni-Cr-Al alloy, which can ensure the preparation of high performance SiCf/Ni-Cr-Al composites.更多还原