设计开发了一种基于MEMS技术的多通道氢气传感器系统,利用LabVIEW虚拟仪器平台对传感变送信号进行采集、存储、处理和数据分析。敏感材料分别选用n型半导体和p型半导体共6种掺杂金属氧化物,传感器件采用平面光刻及硅微加工工艺,集成了加热、测温及敏感等功能,功耗小于20 m W;传感器系统可实现0~1%范围内氢气的检测,且适用于常量氧及低氧条件下的氢气检测,有望在航空航天、国防领域及公共安全等方面得到广泛应用。
【英文摘要】
A multi-channel hydrogen sensor based on MEMS technology is designed and developed.The sensor signal collection,storage,processing and data analysis were completed by using laboratory virtual instrument engineering workbench(Lab VIEW).Six kinds of noble metal doped metal oxide including both n-type semiconductor and p-type semiconductor were used as hydrogen-sensing materials.The sensor integrated heating,measurement and sensing taking planar photolithographic technology and silicon micromachining technolog...
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