The surface micromachining process is a main manufacturing method for Micro-Electro-MechanicalSystem(MEMS).A new system for three-dimensional(3-D)simulation for this process with multi-layer is presented.The surface evolution algorithm is based on the narrow band level set method,because it is stable and computation efficient and also can easily handle the topographic changes to certificate the accuracy of the simulation system.A serious of simulations have been designed and performed using this simulation ...
【基金】
国家863计划项目(2015AA042604)
【更新日期】
2017-05-03
【分类号】
TH-39;TP391.9
【正文快照】
The surface micromachining process has a good compatibility with the CMOS technology,and at the same time it is also one of the most common and commercialized processing techniques,and one core technology for the super-large-scale integration.It can take
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