【摘要】 基于基片弯曲法原理,利用光杠杆放大曲率的方法,本工作研制了一套高精度全自动薄膜应力测试仪。在前期工作的基础上,该仪器实现了样品中心自动定位,样品表面曲率半径高精度测试,以及薄膜残余应力值自动计算等功能。标准光学玻璃圆台表面曲率半径的实测结果表明,应力仪测试精度达到千分位。此外,TiN薄膜应力沿层深分布的测试结果进一步验证了设备的可靠性。更多还原

【Abstract】 A novel type of the computer-controlled device has been successfully developed to automatically measure the residual stress of the thin films with high accuracy,based on substrate curvature technique,optical lever magnification and our previous work.The self-developed program is capable of positioning the sample’ s center,measuring the film s curvature and processing the residual stress with fairly high precision.The newly-developed,residual stress tester was calibrated by measuring the curvature radius of a Thorlabs’ optical spherical lens and tested by evaluating the stress depthdistribution of the arc-ion-plated TiN coatings on substrate of 306 L stainless steel.The calibration showed the accuracy up to three decimal points and a discrepancy below 0.14%.The increases of the GPa order residual stress,top-down from the surface and bottom-up from the interface,were measured,being in good agreement of the results reported in the literature.更多还原