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Effect of Mo capping layers thickness on the perpendicular magnetic anisotropy in MgO/CoFeB based top magnetic tunnel junction structure

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【作者】 刘毅朱开贵钟汇才朱正勇于涛马苏德

【Author】 Yi Liu;Kai-Gui Zhu;Hui-Cai Zhong;Zheng-Yong Zhu;Tao Yu;Su-De Ma;School of Physics and Nuclear Energy Engineering, Beihang University;Key Laboratory of Micro-nano Measurement-Manipulation and Physics, Ministry of Education, Beihang University;Integrated Circuit Advanced Process Center, Institute of Microelectronics, Chinese Academy of Sciences;Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences;

【机构】 School of Physics and Nuclear Energy Engineering, Beihang UniversityKey Laboratory of Micro-nano Measurement-Manipulation and Physics, Ministry of Education, Beihang UniversityIntegrated Circuit Advanced Process Center, Institute of Microelectronics, Chinese Academy of SciencesKey Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences

【摘要】 A detailed study of the magnetic characterizations of the top structure MgO/CoFeB/Mo is presented.The samples show strong perpendicular magnetic anisotropy(PMA) when the thickness of CoFeB is 0.9 nm and 1.1 nm.The saturation magnetic moment and interface anisotropy constant are 1566 emu/cm~3 and 3.75 erg/cm~2,respectively.The magnetic dead layer(MDL) is about 0.23 nm in this system.Furthermore,strong capping layer thickness dependence is also observed.The strong PMA of 1.1 nm CoFeB only exists in a Mo cap layer thickness window of 1.2-2 nm.To maintain PMA,the metal layer could not be too thin or thick in these multilayers.The oxidation and diffusion of the metal capping layer should be respectively responsibility for the degradation of PMA in these thin or thick metal capping layer samples.

【Abstract】 A detailed study of the magnetic characterizations of the top structure MgO/CoFeB/Mo is presented.The samples show strong perpendicular magnetic anisotropy(PMA) when the thickness of CoFeB is 0.9 nm and 1.1 nm.The saturation magnetic moment and interface anisotropy constant are 1566 emu/cm~3 and 3.75 erg/cm~2,respectively.The magnetic dead layer(MDL) is about 0.23 nm in this system.Furthermore,strong capping layer thickness dependence is also observed.The strong PMA of 1.1 nm CoFeB only exists in a Mo cap layer thickness window of 1.2-2 nm.To maintain PMA,the metal layer could not be too thin or thick in these multilayers.The oxidation and diffusion of the metal capping layer should be respectively responsibility for the degradation of PMA in these thin or thick metal capping layer samples.

【基金】 Project supported by the National Fundamental Research Program of China(Grant No.2011CB921804);Beijing Key Subject Foundation of Condensed Matter Physics,China(Grant No.0114023)
  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2016年11期
  • 【分类号】O482.5
  • 【下载频次】16
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