【摘要】 本文提出了一种激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的加工技术。采用金刚石车削在1.5mm厚的氟化锂晶体表面加工两个10μm高度的台阶,然后利用电子束蒸发在氟化锂台阶面镀厚度为几十μm的高致密纯铝膜,再通过金刚石车削工艺将镀铝面车削成平面,最后在氟化锂晶体另一面蒸镀剩余反射率低于1%的增透膜,最终获得高质量的铝/氟化锂复合双台阶靶。采用NT1100白光干涉仪、电子比重计、电子能谱、X射线衍射仪、扫描电镜等设备对靶参数进行测量,研究各工艺对靶参数的影响。更多还原

【Abstract】 The fabrication technique for Al/LiF composite dual-step target used in quasiisentropic compression experiment was described.The two 10 μm high steps were processed by diamond turning technology in the surface of the 1.5mm LiF crystal.The high-density Al film with dozens of micron thickness was coated by electron beam evaporation,and turned into a flat aluminized surface through the diamond turning process.A high-quality Al/LiF composite dual-step target was eventually completed with anevaporated antireflection film(the residual reflectivity was less than 1%)on the other side of the LiF crystal.The target parameters were measured by NT1100 white light interferometer,electron densimeter,electron spectroscopy,XRD and SEM for sensitivity analysis.更多还原