【摘要】 设计了一种膜片上薄膜体声波谐振器(FBAR)结构的伽马辐照剂量计。采用FBAR替代传统伽马辐照检测元件来实现伽马辐照剂量检测的新方法,并提出FBAR呈阵列式分布的结构,可实现辐照剂量和分布的检测。为了对FBAR进行温度补偿,设计了由SiO2与Si3N4组成的双层复合薄膜,SiO2的温度系数为+85×10-6/℃,与具有负温度系数的压电层进行复合,减小了温漂,同时增加了膜片的强度。给出了两种不同结构的阵列式伽马辐照剂量计详细的工艺路线;可望满足阵列式、高灵敏度、微小型化伽马辐照剂量检测的需求。更多还原

【Abstract】 A kind of array type gamma radiation dosimeter using thin film bulk acoustic resonator(FBAR)structure on a membrane was designed.A new method with FBAR replacing of traditional gamma irradiation detecting element was adopted to implement gamma irradiation dose detection.FBAR array structure was put forward to realize the detection of irradiation dose and distribution.In order to carry out the temperature compensation for the FBAR,double composite membrane composed of SiO2 and Si3N4 was designed.Temperature coefficient of SiO2 was+85×10-6/C,compounding piezoelectric layer with negative temperature coefficient,which reduced the temperature drift and increased the intensity of membrane simultaneously.The detailed process flows of two different structures of array type gamma irradiation dosimeter were presented.The array type gamma radiation dosimeter was expected to meet the requirements of array type,high sensitivity and microminiaturization gamma irradiation dose detection.更多还原