【摘要】 采用固相法制备了高性能的Pb(Zr0.54Ti0.46)O3压电陶瓷靶材。通过调整Sr掺杂比例,获得高性能的压电陶瓷配方,以高性能锆钛酸铅(PZT)粉体为原料,经冷等静压和高温烧结制备出磁控溅射需要的、直径为73.6mm的压电陶瓷靶材。更多还原

【Abstract】 The high-performance Pb(Zr0.54Ti0.46)O3piezoelectric ceramic target was prepared by the solid-state sintering method.The formulation of piezoelectric ceramic with high performance was obtained by adjusting the doping ratio of Sr.The piezoelectric ceramic target with diameter of73.6mm was prepared for magnetron sputtering by the cold isostatic pressing and high temperature sintering methods,using high-performance lead zirconate titanate(PZT)powders as raw materials.更多还原