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压电式微固体模态谐振器电荷放大器负载效应的研究

Load Effect Research of Piezoelectric Micro Cuboid Resonator Charge Amplifiers

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【作者】 赵聪吴校生李国斌陈文元刘武崔峰张卫平

【Author】 ZHAO Cong;WU Xiao-sheng;LI Guo-bin;CHEN Wen-yuan;LIU Wu;CUI Feng;ZHANG Wei-ping;Department of Micro-Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,National Key Laboratory of Science and Technology on Micro / Nano Fabrication Laboratory,Shanghai Key Lab of Navigation and Location-based Services;

【机构】 上海交通大学电子信息与电气工程学院微纳电子学系微米纳米加工技术国家级重点实验室上海市北斗导航与位置服务重点实验室

【摘要】 文中采用串联电阻的方法,解决了传统的阻抗分析仪很难满足共振激励需求的问题,研究一种具有特殊电压激励方式的压电式微固体模态谐振器等效电路。通过绘制压电谐振器的导纳圆图,分析并获得压电谐振器在共振频率附近的等效电路参数。通过比较有无电荷放大器作为负载接入压电谐振器的实验结果,发现带有电荷放大器的压电谐振器等效电路的谐振频率从346.119 k Hz降低至344.979 k Hz。得出结论:如果电荷放大器作用于压电谐振器负载端,应该关注它对谐振频率的影响。

【Abstract】 In this paper,the series resistance method was used to solve the problem that traditional impedance analyzer was difficult to meet the demands of resonance excitation. Piezoelectric micro cuboid resonator charge amplifiers equivalent circuit with special voltage incentives was researched. Through drawing piezoelectric resonator admittance circle diagram,the equivalent circuit parameters near the circuit parameters near the resonant frequency were obtained. Comparing the experimental results with and without charge amplifiers as the load connected to the piezoelectric resonator,it is found that resonance frequency with a charge amplifier of the piezoelectric resonator equivalent circuit reduced from 346. 119 k Hz to 344. 979 k Hz. The conclusion was drawn that if the charge amplifiers are used in the piezoelectric resonator,its effect on resonant frequency should be concerned.

【基金】 教育部支撑项目(625010117);上海市科委浦江人才计划项目(14PJD022)
  • 【文献出处】 仪表技术与传感器 ,Instrument Technique and Sensor , 编辑部邮箱 ,2016年09期
  • 【分类号】TN722
  • 【被引频次】2
  • 【下载频次】104
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