【摘要】 随着工业的发展,湿度监测已广泛地应用在仪器仪表、自动控制系统,农业、气候和环境等各个领域。文中以近十几年的文献资料为基础,介绍了目前利用电学、声学和光学各种不同原理制作的湿度传感器,比较了采用陶瓷,半导体、聚合物和纳米等敏感材料制备的湿度传感器对其灵敏度、湿滞,恢复和响应时间等的影响,给出了一些市场上流行的湿度传感器性能指标。并对未来湿度传感器产品应用、制造材料、工艺的趋势做了展望。更多还原

【Abstract】 With industrial development,humidity monitoring has been widely used in various fields such as instrumentation,automatic control systems,agriculture,climate and environment. Based on papers published in the past ten years,humidity sensors designed with the electrical,acoustic,and optical principles were introduced in this paper. The sensitivity,hysteresis,recovery and response time were compared for different humidity sensors made by ceramics,semiconductors,polymers,and nano-structured materials. The performance specifications of market main stream humidity sensor were presented. Trends of humidity sensor’s application,material,and manufacture technology were described.更多还原