【摘要】 AlN陶瓷具有高硬度、与硅相接近的线膨胀系数、高电阻率、低介电常数、低介电损耗以及无毒、耐高温、耐腐蚀等特性,力学性能良好,在电子、机械、复合材料等领域有着广泛的应用。尤其是因为具有高热导率,Al N陶瓷已经成为理想的半导体基板和封装材料之一。本文回顾了Al N陶瓷的发展历程,着重评述了Al N陶瓷的制备技术、性能及应用等方面的研究进展,并对其面临的技术困难及发展方向进行了展望。更多还原

【Abstract】 AlN ceramics with high hardness, linear expansion coefficient and volume resistivity, low dielectric constant, low dielectric loss, non-toxic, high temperature resistance, corrosion resistance and other properties has been widely used in electronics, machinery, composite materials, and other fields. The advantages of high heat conductivity makes the AlN ceramics to become one ideal materials of the semiconductor substrate and encapsulation. This article reviewed the development course of AlN ceramics and emphatically introduced the preparation technology, performance and application field. Furthermore, the technical difficulties and development direction of AlN ceramics is prospected.更多还原