Due to such factors as the nonlinearity of piezoelectric ceramic device and the thermal drift in the system,the AFM tip is difficult to accurately position to the object to be manipulated,which leads to the tip skipping or slippage phenomenon and hinders the development of AFM nanomanipulation. In order to solve this problem,a real-time feedback nanomanipulation system based on local scanning was proposed. In the proposed system,the nanoparticles on the surfaces of samples were taken as a landmark and conti...
究所机器人学国家重点实验室,沈阳110016)纳米科技的最终目标是在纳米尺度上使用单个原子、分子制造功能器件或系统的科学技术.原子力显微镜(atomic force microscope,AFM)的出现对纳米科技发展产生重要的促进作用,高分辨率和操作精度使其成为纳米操控的主要工具[1-3].但AFM最?
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