【摘要】 为确保微带六端口网络能替代矢量网络分析仪用于体声波传感器的射频输出信号检测,分别从微带金属导线的宽度误差和厚度误差对微带六端口网络工作频段的影响进行分析。采用ADS软件的射频等效电路仿真分析得出:微带金属导线的宽度对六端口网络的工作带宽影响较大,金属导体厚度对工作带宽的影响很小,几乎可以忽略不计;由于体声波传感器的读出电路对工作带宽的要求不高,微带六端口网络用于体声波传感器读出电路有良好的工艺健壮性。更多还原

【Abstract】 To ensure that the microstrip six-port network is substituted for the vector network analyzer in detecting RF output signals from bulk acoustic wave sensors, the authors have analyzed the effect of the width error and the thickness error of a microstrip metal wire on the operating bandwidth of the microstrip six-port network. ADS software was used to analyze the S parameters of the network equivalent circuit. The results show that the width of the microstrip metal wire has a great influence on the operating bandwidth of the network while the influence of the thickness is very small and can almost be neglected. As the read-out circuit of the bulk acoustic wave sensor does not require much of the operating bandwidth, the microstrip six-port network can be used for the read-out circuit of the sensor because of its high process robustness.更多还原