【摘要】 化学机械抛光中,抛光垫的材料特性是影响抛光效率和光亮度的重要因素之一。聚氨酯抛光垫通常由聚氨酯和无纺布复合制备而成。具有微结构可调性能的聚氨酯抛光垫由改进后的两步法制得,无纺布浸渍聚氨酯浆料后,部分溶剂在水浴中去除,然后在烘箱中去除剩余溶剂。改进后工艺的预凝聚温度、预凝聚时间、浆料浓度等参数获得了优化,并研究了其对抛光垫结构、性能的影响。改进后的方法使聚氨酯与无纺布纤维紧密结合,既保证了纤维之间孔隙的存在,又增加了材料的强度,在不损失材料硬度的前提下,显著提高了产品的透水性,并有利于打磨效率的提高。与此同时,该方法可以有效减少有机溶剂的使用,大幅缩减生产成本,具有节能、环保的特点。更多还原

【Abstract】 In the chemical mechanical polishing process,the polishing material was one of the most important factors that directly influenced the efficiency and brightness of polishing surfaces. The PU polishing pad usually was prepared by the composite of PU resin and non-wave cloth. And the PU polishing pad with adjustable microstructure was prepared by a modified two-step method. After the cloth suck up the PU slurry,the solvent was partially removed in a water bath,and then followed by a heating process. The slurry concentration,precondensation temperature,precondesation time were optimized and their effects on the material microstructure were discussed. It showed that the obtained polishing pad had an opening porous structure,and the polyurethane adhered well with the non-woven fibers. Such porous structure could ensure good flow permeability. At the meantime,the material strength and hardness were improved. Furthermore,the method reduced the use of organic solvents and decreased the production cost,which provided a more environmentally friendly process for polishing pad preparation.更多还原