【摘要】 采用电弧离子镀技术在高速钢（HSS）基体上制备CrN_x薄膜,考察氮气气压对CrN_x薄膜的表面形貌、结构、显微硬度及摩擦系数的影响。用扫描电镜、X射线衍射仪、显微硬度计、摩擦磨损试验机等分别测试分析薄膜的表面形貌、薄膜的结构、显微硬度以及摩擦系数。结果表明,氮气气压较低时（0.1Pa）,薄膜以Cr相为主;随着氮气气压的升高（0.5⁴.0Pa）,薄膜中出现了Cr₂N和Cr的混合相,薄膜以Cr₂N相为主;随着氮气气压的升高,薄膜的显微硬度在氮气气压为0.5Pa和4.0Pa时出现极值,CrN_x薄膜的最大摩擦系数和平均摩擦系数都有所减少。更多还原

【Abstract】 The CrN_xthin films were deposited by arc ion plating on substrate of high speed steel. The influence of vacuum chamber pressure on suface morphology,structure,microhardness and friction coefficient of the CrN_xthin films were investigated. The surface morphology,structure,microhardness and friction coefficient of the CrN_xthin films were tested with scanning electron microscopy,X-ray diffractometer,microhardness tester,friction wear testing machine and so on. In the low pressure nitrogen（ 0. 1 Pa）,the thin film phase group become Cr phase,with the nitrogen pressure increased（ 0. 5 4. 0 Pa）,thin film phase group become Cr₂N phase and Cr phase,the thin film is given priority to with Cr₂N phase. With the nitrogen pressure increased,the microhardness of the films express a maximum at the nitrogen pressure of 0. 5 Pa and 4. 0 Pa,the maximum friction coefficient and the average friction coefficient is smaller.更多还原